8

High energy ion implantation into silicon— an application in CMOS technology

Year:
1989
Language:
english
File:
PDF, 505 KB
english, 1989
13

The fabrication of advanced transistors with plasma doping

Year:
2002
Language:
english
File:
PDF, 160 KB
english, 2002
26

Plasma doping for shallow junctions

Year:
1999
Language:
english
File:
PDF, 501 KB
english, 1999